We have selected suitable processes for treating waste gas for you based on the information you have provided. Each of our systems can be individually adapted to your requirements. This means you always get the most efficient solution for your application.
Wet Chemical Gas Treatment
CT-W wet scrubber (point-of-use)
Information
Suitable for treating waste gases from various applications including etching and epitaxial processes
Efficient and cost-effective treatment of HCl, HF, SiH2Cl2, SiCl4 and NH3 along with other acidic and alkaline waste gases
Uptime enhancements such as mechanical inlet cleaning, N2 Venturi flushing and heated exhaust gas inlets for WF6, BCl3, AlCl3 and NH4Cl possible
Highlights
Efficient particulate capture in the system
Minimal fresh water consumption through low operating costs
> 99% up-time with quick and easy maintenance
Quality ‘Made in Germany’
Equipment
Operation with both acidic and alkaline neutralizing agents possible
Available in an explosion-proof version for high H2 flows
Custom backup configurations
Industries
Semiconductor
Photovoltaic
LED
Universities and research institutes
Chemicals industry
Industrial gas manufacturers
And many more
We advise you personally
Each of our abatement systems can be individually adapted to your requirements. Our team takes a detailed look at your industrial installation in a face-to-face meeting and recommends the optimized waste gas treatment solution.
