Wet Gas
Treatment

High efficiency
with two
wash stages

Efficient removal
of water-soluble
gases and particles

Internal
neutralization to
minimize fresh
water consumption

Integrated
packing
bed scrubber

During wet scrubbing, water-soluble harmful substances in the waste gas are scrubbed and absorbed into the liquid phase. Our selection of two different scrubbers offers the right solution for every application.

01

CT-W wet scrubber
(point-of-use)

Information
  • Suitable for treating waste gases from various applications including etching and epitaxial processes
  • Efficient and cost-effective treatment of HCl, HF, SiH2Cl2, SiCl4 and NH3 along with other acidic and alkaline waste gases
  • Uptime enhancements such as mechanical inlet cleaning, N2 Venturi flushing and heated exhaust gas inlets for WF6, BCl3, AlCl3 and NH4Cl possible
Highlights
  • Efficient particulate capture in the system
  • Low operating costs through minimal fresh water consumption
  • > 99% up-time with quick and easy maintenance
  • Quality Made in Germany
Equipment
  • Operation with both acidic and alkaline neutralizing agents possible
  • Available in an explosion-proof version for high H2 flows
  • Custom backup configurations
Industries
  • Semiconductor
  • Photovoltaic
  • LED
  • Universities and research institutes
  • Chemicals industry
  • Industrial gas manufacturers
  • And many more

02

CT-W central wet washer
for High Volume Flow Gas Treatment

Information
  • End-of-pipe house washers for industrial operations
  • Very high cleaning efficiency for water-soluble gases including NH3, HCl, HF, methanol, and ethanol
  • Use of several high-pressure counterflow nozzles for the effective cleaning and separation of the smallest particulate matter
Highlights
  • Flexible design for volume flows from 400 m3/h to 12,000 m3/h, adapted to your specific requirements
  • Individual dimensioning and configuration
  • High efficiency with small footprint
  • Low maintenance and excellent accessibility
  • Quality ‘Made in Germany’
Equipment
  • Operation with both acidic and alkaline neutralizing agents possible
  • Individual equipment configuration depending on volume flow and gas species
Industries
  • Semiconductor
  • Photovoltaic
  • LED
  • Universities and research institutes
  • Chemicals industry
  • Industrial gas manufacturers
  • And many more
centrotherm-cs-vertrieb-desktop-kontakt-kraus-3x2-02

We advise you personally

Each of our abatement systems can be individually adapted to your requirements. Our team takes a detailed look at your industrial installation in a face-to-face meeting and recommends the optimized waste gas treatment solution.

Thomas Kraus
Sales Europe

T +49 7344 92494-114
M thomas.kraus@centrotherm-cs.de